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Figure 1. The SNE-4500M Plus with numbers denoting the key interactions for a user. Image from the SNE-4500M Plus user manual at www.seceng.co.kr

I. Introduction

What is the SEM? What does the SEM do? What are additional resources (link them here)

Can steal some of the text out of the Hitachi User Guide (explaining how SEMs work)

For EDS, first follow this Quick Start Guide and then proceed to (link)

II. Procedure

A. Sample preparation and loading the sample

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• Make the spot size more diffuse
• Decrease the accelerating voltage
• Try Low Vacuum
• Make sure the sample is conductive

D. Capture an image

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Annotating the image (optional)Annotating

Saving the image

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File structure (need to save to C:\SEM)

E. Shutdown

1. When you are finished scanning, turn the beam off by clicking the Stop button in the Operation dropdown panel.
2. Bring the motor back to the zero position by clicking Home
3. Nanoeye software can now be closed
4. Push the vacuum button (Figure 1.3). This will initiate the chamber filling with air, and you can track the progress using the LED strip on the front of the instrument.
5. The door will be easily opened once pumped with air
6. Remove your specimen mount from the holder (Figure 5), removing the specimen from the stub adapter if used.
7. Close the door, then push the vacuum button (Figure 1.3) to initiate a vacuum sequence.
8. Once the vacuum has be reached, turn off the SEM (Figure 1.2). When not in use, the SEM should be closed, at vacuum, and powered off.

III. Uploading Data to LIMS

Updated SEM Uploader

IV. Preventative Maintenance

Once per expedition

• Using a small extendable mirror and a flashlight, carefully examine the mylar cap on the tip of the EDS detector to make sure that it is still intact. If it is broken (typically due to collision), take a picture and send it to the SEM vendor for instructions on how to replace the mylar cap.
• Examine the stage and use canned air to blow off any dust present on the stage. The chamber should not require cleaning, but if there is any material or fingerprints on the inside, they can be cleaned off using isopropanol and a kimwipe.
• Examine the sealing surface on the SEM door for any accumulated dust, and clean off if necessary. A small amount of vacuum grease (jar in SEM accessories tote, or Dow-Corning 111) can be applied to the sealing surface.
• Examine the oil level on the vacuum pumps and add more/replace if necessary. The vacuum pump on the SEC SEM takes special high-vacuum oil, which should not be substituted with other vacuum oils.

1-2 times per year

• Go into the SEM software and check the number of hours on the filament. Filaments typically last around ___ hours, and a failing filament is typically indicated by the emission current reading in the SEM software (any values outside 110+/-20 uA). It is good to be aware of where a filament is, relative to its livespan, so technicians can be prepared to replace it.
• Drain the oil from the vacuum pumps and replace with new oil. The vacuum pump on the SEC SEM takes special high-vacuum oil, which should not be substituted with other vacuum oils.

IV. Credits

Version 1 of this document was written by Luan Heywood , Sarah Kachovich and Kara Vadman, on Exp 397T, with previous contributions by Sarah Kachovich. This document was reviewed by ___ on ___.

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